Raws li cov ntaub ntawv muaj feem cuam tshuam, hauv lub ntiaj teb sensoror kev ua lag luam, Asmeskas cov laj thawj ntawm kev ua lag luam thoob ntiaj teb, uas muaj feem cuam tshuam nrog cov tseem ceeb rau lub sensor.
Tebchaws Asmeskas yog qhov tseeb ntawm cov ntaub ntawv kiv puag ncig, raws li ib qho ntawm peb lub tshuab thev naus laus zis ntawm cov thev naus laus zis tshiab los ntawm Asmeskas. Thaum ntxov li xyoo 2004, Asmeskas National Science Foundation (NSF) tso tawm ib daim ntawv tshaj tawm tshwj xeeb heev - "Lub kiv puag ncig sensor" (lub kiv puag ncig ntawm sensor). (Yog tias koj txaus siab rau daim ntawv tshaj tawm no, thov saib cov ntsiab lus: NSF tso: Lub kiv puag ncig sensor.)
Mems (micro-tshuab siv tshuab) yog lub tshuab hloov tawm hauv lub teb sensor. Raws li ib feem ntawm cov kev ua kom txhawb nqa kev kawm pom ntawm lub tebchaws Meskas (NSF tau pab nyiaj txiag), lub hom phiaj qhia kev kawm thiab kev kawm kev kawm.
Kab lus no tau txhais los ntawm keeb kwm ntawm cov mems, ib qho ntawm scme scme kev kawm series, uas muabKev siv thev naus laus zis thev naus laus zis, npog cov ntsiab lus tseem ceeb thiab cov cim tseem ceeb hauv cov lej: suav nrog cov khoom sib tw tshaj plaws (uas yog qhov tseeb ntawm cov txiaj ntsignyemsensors), cov ntaub ntawv tseem ceeb tshaj plaws hauv cov mems teb, thiablwm cov ntsiab lus.Cov ntaub ntawv, thiab lwm yam.Nws raug pom zoo rau txhua tus!
Rau"Keeb kwm ntawm Mems" (Keeb kwm ntawm Mems)PDF Daim Ntawv Qhia Tseem Ceeb (Lus Askiv), koj tuaj yeem tshawb cov ntsiab lus [Mems Keeb Kwm] nyob rau hauv lub sensor kws muaj txuj ci network, hauv kab lus xov xwm nplooj ntawv rau cov ntaub ntawv rub tawm tuaj yeem yog.
Sensor Kws Muaj Peev Xwm(Setorexpert.com.cn) tsom rau lub teb ntawm sensor technology, tau cog lus rau lub ntiaj teb txiav kev pab ntsug, yog cov khoom nug cov khoom lag luam ntsug, yog cov ntaub ntawv qhia xov xwm sensor thiab xov xwm cov ntaub ntawv pabcuam platform. Raws li cov khoom lag luam rhiab thiab thev naus laus zis, feem ntau ntawm cov kws kho hluav taws xob thiab cov tuam ntxhab sensor los muab kev sib raug zoo thiab kev lag luam kom raug thiab docking.
Microeltromechanical (Mems) muaj cov xwm txheej muaj tej yam me me uas nyob hauv peb lub neej niaj hnub. Mems Cheebtsam ntau qhov loj me los ntawm ib feem ntawm ib lab (micron) rau ib ntu ib txhiab (millimeters). Lawv tseem hu ua Micrimechanics, microsystems, micromachines, lossis microsystems technology (MST).
Cov mem tes yog tsim los ntawm ntau cov ntaub ntawv thiab cov txheej txheemSiv cov ntaub ntawv xws li cov semiconductors, plastics, ceramics, cerroelectrics, magnetics, thiab ⽣.
Cov ntaub ntawv siv muaj xws li semiconductors, plastics, ceramics, ceramics, hlau, sib nqus, thiab cov ntaub ntawv sib nqus.
Mems yog siv raws li sensors, actuatators, cov ntsuas hluav taws xob,lub pob xa khoom, gameecontrollers, thiab teeb meem teeb meem, rau npe tsuas yog ob peb daim ntawv thov.
Mems tam sim noSiv hauv cov tsheb, tshuab hluav taws xob aerospace, kev siv tshuaj thiab kev kho mob, cov tshuab luam ntawv, wireless thiab kho qhov muag, thiab siv cov ntaub ntawv tshiab yog nthuav tawm txhua hnub.
Hauv xyoo 1965, Gordon Moore ua qhov kev soj ntsuam uas txij li qhov tsim muaj ntawm lub transistor thaum xyoo 1940, tusTus naj npawb ntawm cov transistors ib square inch atintegratedtxoj kev ua voj voogtau ob npaug rau txhua 18 lub hlisTxij li xyoo 1950 txog thaum ntxov 1960s, ibSoj ntsuam uas underlies "Moore txoj cai. Moore tau hais nyob rau hauv nqe lus no," rau qhov uas lawv xav paub txog kev ua me, tsis loj dua. "
"Moore qhia tias cov thev naus laus zis muaj thiab yuav ua rau yav tom ntej rau yav tom ntej ntawm kev me me, tsis loj dua."
Zoo li lub transistor, cov neeg tau sim ua hluav taws xob ntsuas me me thiab ib tug txiv neej tseem ceeb, thiab ib tug txiv neej nyob rau hauv qab ":" Lawv qhia kuv tias lub tshuab hluav taws xob Qhov loj ntawm cov ntiv tes rau ntawm koj tus ntiv tes me, thiab nws yog lub ntiaj teb me me, me me. "
Gordon Moore thiab Richard Feynman tsuas yog ob qho piv txwv ntawm cov kws tshawb fawb uas tab tom kwv yees me me thiab me me tawm cov kev yees duab me me. Kab lus no yuav tham txog cov thev naus laus zis thiab cov hom phiaj uas yog kev tawm hauv cov ntawv sau.
TSEEM CEEB MEEM MARSTONES
Lub hnub yug mems tau tshwm sim rau ntau qhov chaw thiab dhau ntawm cov neeg muaj ntau tus neeg. Tau kawg, cov mems tshiab thev naus laus zis thiab cov ntawv thov raug tsim txhua hnub. Qhov no suav nrog kev siv ntau yam uas tau ua rau kev txhim kho ntawm cov lej.
Hauv qab no yog ncua sij hawm uas ua tiav ncua sij hawm ntawm Mems Technology kev txhim kho. Pib nrog thawj tus taw tes sib chwv ntawm lub chaw thev naus laus zis ntawm xyoo 1999, Mems tau pab txhawb tam sim no kev nrhav mus los ntawm ntau qhov kev nria hauv ntau dua 50 xyoo.
Hauv qab no txog 35 lub vanestones hauv keeb kwm ntawm Mems, peb tuaj yeem pom tau tias muaj ntau tus neeg ua haujlwm hauv lub chaw ua haujlwm, tsev kawm qib siab thiab cov tuam txhab uas tau ua rau cov kev txhawb nqa tseem ceeb rau kev txhim kho ntawm Mems:
- Xyoo 1948, Germanium transistor tau tsim nyob rau ntawm Hiav Lab (William Shockerley)
- Xyoo 1954, Piezoresistive cuam tshuam ntawm German thiab silicon (CS Smith)
- Xyoo 1958, thawj Congsated Circuit Court (IC) (JS Kilby 1958 / Robert NoYce 1959)
- 1959, "Ntau chav nyob hauv qab" (R. Feynman)
- 1959, pom thawj lub suab ntxiag (Kulite)
- Xyoo 1967, anisotropic sib sib zog nqus silicon etching (ha waggener li al.)
- Xyoo 1968, resonant rooj rooj rooj vag tentistor patented (hom txheej txheem ib micromacining) (H. Nathanson li al.)
- Xyoo 1970, Batch-etched Silicon Wafers siv raws li siab sensors (batch micromachinining txheej txheem)
- Xyoo 1971, Microprocessor tau tsim
- Xyoo 1979, Hewlett-Packard Micromachined Inkjet Nozzle
- Xyoo 1982, "Silicon ua cov khoom siv" (K. Petersen)
- Xyoo 1982, Kev Kawm Liga (KFK, Lub Tebchaws Yelemees)
- Xyoo 1982, Resposable ntshav sensor (honeywell)
- Xyoo 1983, Ua ke siab sensor (honeywell)
- 1983, "Infinitesimal Machinery", R. Feynman.
- 1985, sensor lossis tsoo sensor (airbag)
- 1985, nrhiav pom ntawm "buckyball"
- Xyoo 1986, Tsim muaj ntawm Cov Lus Qhia Atomic Yuam Kev
- Xyoo 1986, Silicon Wafer koom (M. Shimbo)
- Xyoo 1988: Loj ntau lawm ntawm lub siab sensors los ntawm WAF FEEM (NOVA SCORT)
- 1988, rotary electrostatic sab tsavlub cav(Kiv cua, tai, muller)
- 1991, txhua xyoo polyCrystalline Silicon Pob Khawm (Pister, Judy, Burial, ntshai).
- 1991, nrhiav tau ntawm cov nanotubes
- 1992, grating lub teeb modulators (solgaard, Sandejas, Bloom)
- 1992, ntau micromachining (qw txheej txheem, cornell)
- 1993, Digital Daim iav Zaub (TexasQho twj)
- 1993, MCNC ua cov kev pabcuam Mumps
- 1993, thawj pawg-tsim saum npoo-micromachined accelerometer (analog pab kiag li lawm)
- Xyoo 1994, Bosch tob Reasse ion ion etching txheej txheem patented
- 1996, Richard Smalley tsim cov thev naus laus zis los tsim cov pa roj carbon monoxide.
- Xyoo 1999, Kho Qhov Muag Hluav Taws Xob Txuas (Lucent)
- 2000s, Kho Qhov Muag Mems Boom
- 2000s, Biomems Surge
- Qhov 2000s pom qhov nce ntawm cov naj npawb ntawm cov mem tes thiab cov ntawv thov.
- 2000s, NEMS daim ntawv thov thiab kev txhim kho thev naus laus zis
Xyoo 1947 tsim muaj ntawm taw tes transistor (germanium)
Xyoo 1947, William Shocks, John Bardeen, thiab Walter Barthen ntawm cov lab kas fes ua tiav hauv tsev thawj tus taw tes transistor. Lub chaw siv hluav taws xob trangium no, kev siv tshuaj lom neeg ib nrab.
Qhov kev cuam tshuam no qhia tau tias muaj peev xwm ua rau transistors los ntawm semiconductor cov khoom siv, tso cai tswj hwmfai fab hov ntauthiabniaj hnub.Nws kuj qhib lub qhov rooj los ua cov tshuab hlauv me thiab me dua. Daim ntawv tso cai patent rau Germanium npn kev loj hlob trentor tau raug xa los ntawm William Shocksle hauv xyoo 1948.
Tus thawj lub transistor tau hais txog ib nrab-nti siab thiab yog yeej loj dua piv rau cov qauv niaj hnub no. Niaj hnub no, cov kws tshawb fawb tuaj yeem tsim cov nanotransistors uas yog li 1 nanometer hauv txoj kab uas hla. Rau kev siv, tib neeg cov plaub hau yog hais txog 60-100 microns.
Tshawb nrhiav ntawm cov txiaj ntsig piezoresistive hauv Silicon thiab Germanium xyoo 1954
Xyoo 1954, CS Smith nrhiav tau cov kab ke piezoresistive hauv cov ntaub ntawv semiconductor xws li silicon thiab German. Qhov kev ua tau zoo no cov txiaj ntsig zoo no nyob rau hauv cov semiconductors tuaj yeem txiav txim siab ntawm qhov ntau dua li cov geometric piezoresive ua rau cov hlau.Qhov kev tshawb pom no yog qhov tseem ceeb rau kev nco vim tias nws pom tias silicon thiab German tuaj yeem nkag siab lub siab ntawm huab cua lossis dej zoo dua li cov hlau.
Qhov kev tshawb pom ntawm cov kab ke ntawm cov kab ke semiconductors tau tsim rau kev coj ua lag luam ntawm Silicon Lim Tsheb ntawm liab qab Silicon Lim Gauges.
Xyoo 1958, thawj Circuit Court sib xyaw (IC) tau tsim
Thaum lub tensistor tau tsim, qhov loj me ntawm txhua transistor tau txwv vim tias nws yuav tsum txuas nrog cov xov hlau thiab lwm yam khoom siv hluav taws xob. Raws li qhov tshwm sim, qhov kev txiav tawm ntawm cov tranessor tuaj rau sawv ntsug kom txog rau thaum lub sijhawm muaj kev tawm tsam "COGRACCATOR.
Ib qho kev sib xyaw ua ke yuav muaj cov transistors, resistors, capacitors, thiab xaim kom tau raws li qhov kev xav tau ntawm ib daim ntawv thov. Yog tias cov khoom sib xyaw ua ke yuav raug khi rau ntawm ib lub substrate, tag nrho cov cuab yeej tuaj yeem ua txawm me dua.
Yuav luag txhua lub sijhawm, ob tus neeg ntawm nws tus kheej tsim kev sib tw sib xyaw ua ke.
Xyoo 1958, Jack Kilby, ua haujlwm rau Texas cov twj paj nruag, tsim tus qauv ua haujlwm ntawm cov "khoom-hauv lub xeev hluav taws xob".Qhov Circecth no suav nrog tus transistor, peb lub tshuab luam, thiab lub capacitor, txhua tus mounted ntawm ib daim ntawv ntawm German.
Tsis ntev tom qab, Robert NoYce of Fairchild semiconductor tau ua thawj lub " Qhov kev sib xyaw ua ke no tau ua rau ntawm sicicon nti, thiab Robert NoYce tau txais nws thawj daim ntawv patent hauv xyoo 1961.
1959 "Ntau chav nyob hauv qab"
Xyoo 1959, ntawm kev sib ntsib ntawm Asmeskas lub neej hauv zej zog, ib tug txiv neej npe hu ua Ricro- thiab Nanotechnology nrog lub koob npe nrov hais lus "muaj ntau chav nyob hauv qab."
Nyob rau hauv nws qhuab qhia, nws tau nug cov lus nug:"Vim li cas peb tsis tuaj yeem sau tag nrho {0}} volt encyclopaedia Britannica ntawm lub taub hau ntawm tus pin?"